China makes progress in 3-nm chips without advanced lithography tools2-MIN READ2-MIN1ListenPublished: 8:00am, 19 Sep 2026Chinese researchers have made early strides in pushing semiconductor processing nodes below 3-nm using older lithography technology, as more advanced extreme ultraviolet lithography (EUV) tools from ASML remain blocked under US sanctions.The breakthrough marks the latest progress in China’s drive to chart an alternative path to advanced chipmaking amid US export restrictions. Under current export control rules, Dutch equipment giant ASML is barred from selling its state-of-the-art EUV machines – essential for producing chips below the 7-nm node – to Chinese clients.Select VoiceSelect Speed0.8x0.9x1.0x1.1x1.2x1.5x1.75x1xAI-generated voice
SRCSouth China Morning Post
LANGEN
LEANCenter-Right
WORDS99
ENT10
SAT · 2026-09-19 · 00:00 GMTBRIEF NSR-2026-0919-112426
NSR-2026-0919-112426News Report·EN·Technology
China makes progress in 3-nm chips without advanced lithography tools
Chinese researchers have achieved early progress in developing semiconductor processing nodes below 3-nm, utilizing older lithography technology. This development comes as the United States' sanctions prevent Dutch company ASML from selling its advanced extreme ultraviolet (EUV) lithography machines to Chinese clients.
Ann CaoSouth China Morning PostFiled 2026-09-19 · 00:00 GMTLean · Center-RightRead · 1 min
South China Morning PostFIG 01
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99words
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Briefing Summary
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Chinese researchers have achieved early progress in developing semiconductor processing nodes below 3-nm, utilizing older lithography technology. This development comes as the United States' sanctions prevent Dutch company ASML from selling its advanced extreme ultraviolet (EUV) lithography machines to Chinese clients. EUV machines are considered essential for manufacturing chips at nodes below 7-nm. This breakthrough represents China's ongoing efforts to establish an independent route to advanced chipmaking in the face of US export restrictions. The progress was reported on September 19, 2026.
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Model · rule-basedFraming
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ASML is barred from selling its state-of-the-art EUV machines to China under current export control rules.
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Advanced EUV lithography tools from ASML are blocked for Chinese clients due to US sanctions.
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This progress represents China's effort to find alternative chipmaking methods amid US export restrictions.
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Chinese researchers are developing 3-nm chips using older lithography technology.
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8 terms3-nm chips
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lithography tools
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semiconductor processing
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us sanctions
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export restrictions
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asml
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euv machines
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advanced chipmaking
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