tungsten hexafluoride

Tungsten(VI) fluoride, also known as tungsten hexafluoride, is an inorganic compound with the formula WF6. It is a toxic, corrosive, colorless gas, with a density of about 13 kg/m3 (22 lb/cu yd). It is the densest known gas under standard ambient temperature and pressure and the only well-characterized gas under these conditions that contains a transition metal. WF6 is commonly used by the semiconductor industry to form tungsten films, through the process of chemical vapor deposition. This layer